Drill and Laserdrill  Hitachi CO2 Laser Drilling Machine LCO-1B21E Design concept:  High speed laser drilling, 30.000 holes/min  Auto load and unload  Same operation as conventional drilling machine  Conventional drilling program applicable  Auto alignment by CCD system  Low running cost Specification:  Split axis, speed 50 m/min  Position resolution 1 µm  Panel size 535 x 690 mm (option, panel 560 x 610 mm)  Galvo 700 Hz, generating 700 holes/sec  Minimum hole diameter 50 µm  Excellon II, Excellon DNC 1.3  Auto loader/unloader to wagon, 300 mm stack  CO2 Laser Drilling Process  Material: 50 µm Epoxy  Hole Diameter: 150 µm  Pulse Width: 15 µs 1 Shot 2 Shots 3 Shots